Liu Jinquan

Associate Professor

Phone: (027) 87543880-8213


Academic Areas: MEMS for Precision Gravimetry

Research Interests: MEMS for Precision Gravimetry


Jinquan Liu received his BSc degree in Physics from the Peking University, Beijing, China, in 1997 and his MSc degree in optical physics from the Institute of Physcis under the Chinese Academy of Sciences, Beijing, China, in 2000. He obtained his PhD degree in nano photonics from the Swiss Federal Institute of Technology, Lausanne, in 2007. As a postdoctoral, he worked on nano-tip enhanced Raman spectroscopy in the Max Planck Institute of Microstructure Physics at Halle (Germany) in 2007, and then in the Swiss Federal Laboratories for Materials Testing and Research at Thun in 2008. He is presently an Associate Professor in the School of Physics, Huazhong University of Science and Technology. His current research interests focus on MEMS for precision gravimetry.

Academic Degrees

PhD in nano photonics, 2007, Swiss Federal Institute of Technology, Lausanne

Professional Experience

2010-Present : Associate Professor, Huazhong University of Science and Technology;

2008-2009: Postdoctoral Researcher, Swiss Federal Laboratories for Materials Testing and Research at Thun;

2007-2008: Postdoctoral Researcher, Max Planck Institute of Microstructure Physics at Halle.

Selected Publications

(1) Jinquan Liu, Chao Wang, Tao Zhu, Wenjie Wu, Ji Fan and Liangcheng Tu, Low temperature fabrication and doping concentration analysis of Au/Sb ohmic contacts to n-type Si, AIP Advances, 2015, 5: 117112

(2) Wenjie Wu, Tao Zhu, Jinquan Liu, Ji Fan and Liangcheng Tu, Polyimide-Damage-Free, CMOS-Compatible Removal of Polymer Residues from Deep Reactive Ion Etching Passivation, Journal of Electronic Materials, 2015, 44: 991-998

(3) Liangcheng Tu, Zhiwei Wang, Jinquan Liu, Xiangqing Huang, Zhu Li, Yafei Xie and Jun Luo, Implementation of the scale factor balance on two pairs of quartz-flexure capacitive accelerometers by trimming bias voltage,Review of Scientific Instruments, 2014, 85: 095108

(4) Rudy Ghisleni, Jinquan Liu, R. Raghavan, Pierre Brodard, A. Lugstein, K.Wasmer and Johann Michler, In situ micro-Raman compression: characterization of plasticity and fracture in GaAs,Philosophical Magazine,2011,91: 1286-1292

(5) Yong Wang, Michael Becker, Li Wang, Jinquan Liu, Roland Scholz, Juan Peng, Ulrich Gösele, Silke Christiansen, Dong Ha Kim and Martin Steinhart, Nanostructured Gold Films for SERS by Block Copolymer-Templated Galvanic Displacement Reactions, Nano Lett., American Chemical Society, 2009, 9:2384-2389

(6) O Sardan Sukas, Jinquan Liu, and P. Bøggild, Measuring the temperature of topology optimized electrothermal microgrippers using Raman spectroscopy, ASME Conference Proceedings, American Society of Mechanical Engineers, 2009, 12:101-104

(7) Jinquan Liu, Andrea Callegari, Martin Stark and Majed Chergui, A simple and accurate method for calibrating the oscillation amplitude of tuning-fork based AFM sensors, Ultramicroscopy, 2008, 109: 81-84

(8) Yong Wang, Jinquan Liu, Silke Christiansen, Dong Ha Kim, Ulrich Gösele, and Martin Steinhart, Nanopatterned Carbon Films with Engineered Morphology by Direct Carbonization of UV-stabilized Block Copolymer Films, Nano Lett., American Chemical Society, 2008, 8: 3993-3997

(9) Jérôme Morville, Jinquan Liu, Andrea Callegari and Majed Chergui, Q-Factor optimization of a tuning-fork/fiber sensor for shear-force detection, Applied Physics Letters, American Institute of Physics, 2005,86: 064103-064105

Selected Cases

Awards and Honors

Courses Taught

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